下载掌阅APP，畅读海量书库
立即打开
［1］ Bowen D K. Calibration of liner transducers by X-ray Interferometry, in form instrumentation to Nanotechnology (eds. J. W. Gardner and H. T. hingle). Gordon and Breach Science Publishers, USA, 1991, Ch. 16, 319～331.
［2］ Kato H, Kojima M, Okumura Y, et al. Photoelectric Inclination Sensors. Sensors and Actuators, 1990, 21-23: 289～292.
［3］ Canali C, et al. An ultrasonic proximity sensor operating in air. Sensors and Actuators, 1981, 2: 97～103.
［4］ Magori V, Walker H. Ultrasonic presence sensors with wide range and high resolution. IEEE Trans. on UFFC, 1987, 34: 202～211.
［5］ Stemme G N. A monolithic gas flow sensor with polyimide as thermal insulatior. IEEE Trans. on Electron Devices, 1986, 33: 1470～1474.
［6］ Oudheisen B W, Huijsing JH. An electronic wind meter based on a silicon flow sensor. Sensors and Actuators, 1990, 21-23: 420～424.
［7］ Bouwstra S, Legtenberg R, Tilmans HAC, et al. Resonating microbridge mass flow sensor. Sensors and Actuators, 1990, 21-23: 332～335.
［8］ 吴俊伟．惯性技术基础．哈尔滨：哈尔滨工程大学出版社，2002.
［9］ 黄德鸣，程禄．惯性导航系统．哈尔滨：哈尔滨运动体工程学院出版社，1988.
［10］ 刘俊，石云波，李杰．微惯性技术．北京：电子工业出版社，2005.
［11］ 董景新．微惯性仪表—微机械加速度计．北京：清华大学出版社，2002.
［12］ 鲍敏杭，吴宪平．集成传感器．北京：国防工业出版社，1987.
［13］ Smith C S. Piezoelectric effect in germanium and silicon. Phys. Rev., 1954, 94, 42～49.
［14］ Mason W P. Use of solid-state transducers in mechanics and acoustics. J. Aud. Engineering Soc., 1969, 17: 506～511.
［15］ Brugger J, Buser R A, Rooij N F. Silicon cantilevers and tips for scanning force microscopy. Sensors and Actuators, 1992, 34: 193～200.
［16］ Seidel H, Reidel H, Kolbeck R, et al. Capacitive silicon accelerometer with high symmetrical design. Sensors and Actuators, 1990, 21-23: 312～315.
［17］ Longwell T F. An experimental semiconductor microphone. Automotive Elect. Tech. J., 1968, 11(3): 109～116.
［18］ Ansermet S, Otter D, Craddock RW, et al. Cooperative development of piezoresistive pressure sensor with integrated signal conditioning for automotive and application. Sensors and Actuators, 1990, 21-23: 79～83.
［19］ Esashi M, Komatsu H, Matsuo T. Biomedical pressure sensor using buried piezoresistors. Sensors and Actuators, 1983, 4: 537～544.
［20］ Prudenziati M, Morten B, Taroni A. Characterization of thick-film resistor strain on enamel steel. Sensors and Actuators, 1981, 2: 17～27.
［21］ Erskine J C. Polycrystalline silicon on metal strain gauge transducers. IEEE Trans, Electron Devices, 1983, 30: 796～801.
［22］ Zwicker U T. Strain sensor with commercial SAWR. Sensors and Actuators, 1989, 17: 55～56.
［23］ D'Amico A and Verona E. SAW sensor. Sensors and Actuators, 1989, 17: 55～66.